Semiconductor Equipment
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Optical Inspection System
(LAZIN)- Model:LODASTM
- Date:2020/3/6
- Email:sw@sellingware.com.tw
The Lazin-LODAS defect inspection system provides high reliable、high sensitivity and high speed defect inspection for photomask 、Si wafer 、SiC wafer and related epi wafer manufactures. It helps the industry improve the product quality as well as the production line yield.
Sensitivity :0.1µm
WPH :>20 pcs for 6” wafer
Application : Quartz/ Glass substrate; Photomask blanks;