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Semiconductor Equipment

Si, SiC, GaN, GaAs bare wafer & epi wafer defect inspection

(Phys)
  • Model：NIR-PLuS
  • Date：2023/7/25
  • Email：sw@sellingware.com.tw

 PL measurement is a non-contact, non-destructive measurement. Using PL can detect large-volume internal defects and impurities which cannot be detected by ordinary AOI equipment. Compared with general electrical measurement defects, PL has the advantages of fast speed, high resolution, and can be applied on both bare & Epi wafer inspection.

Si Slip Dislocation

GaN缺陷檢測

GaAs PL defect map

 

Si晶片生長缺陷

SiC map before KOH

 

Si growth impurity / Slips 

Global professional services by Selling-Ware

Since 1990, Selling-Ware Company is a professional provider of materials and equipment in semiconductor, optoelectronics and panel industry. Acting products are South Korea, Japan, the United States, Germany, Singapore, Malaysia, China's well-known brands.
33 years of experience accumulation, Selling-Ware Company is well familiar with the market and the trend of technology, and can highly grasp new equipment and new materials, such that we become a reliable and long-term partner of well-known technology companies.
Headquartered in Tai Yuan Hi-tech Industrial Park, Hsinchu County, Taiwan and set branch offices in Taichung, Kaohsiung, Kunshan, Suzhou, Shenzhen, Chengdu, Xi'an, Wuhan, Jinjiang, Beijing, Wuxi, we provide customers better local services, and enhance customer competitiveness.