Product Information
Product NameEddyCus® ResMapper
BrandSURAGUS
Product ModelNA
Sales Contact
Specifications
The EddyCus® ResMapper is a fully automated chip imaging device (fully automated model) with an automated chip cassette handling system for full-area characterization of chip substrates or coatings to ensure process reliability and quality assurance in the semiconductor industry.
The system is equipped with two non-contact eddy current sensors operating in transfer mode. This allows for highly detailed visualization of the uniformity of the substrate material or conductive coating.
This device is typically used for:
• Resistivity 0.1 – 100 mOhm-cm,
• Board resistivity ranging from 0.0001 – 100,000 ohms/square,
• Thin film metal layer thickness ranging from 2 nm to 1 mm,
• Total thickness variation ranging from 300 – 1,000 µm and bow pitch ± 1 mm.