Optical Inspection System

The Lazin-LODAS defect inspection system provides high reliable、high sensitivity and high speed defect inspection for photomask 、Si wafer 、SiC wafer and related epi wafer manufactures. It helps the industry improve the product quality as well as the production line yield.

Sensitivity ：0.1µm

WPH ：>20 pcs for 6” wafer

Application : Quartz/ Glass substrate; Photomask blanks; SiC/ GaN/ Sapphire/ Si/ GaAs wafers and  Epi wafers