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Vision SemiconSemiconductor equipment

High Throughput ICP Plasma Etcher

Model: VSP-888 SH2

High Throughput ICP Plasma Etcher

Product Information

Product NameHigh Throughput ICP Plasma Etcher
BrandVision Semicon
Product ModelVSP-888 SH2
Sales Contactsw@sellingware.com.tw
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Specifications

Descum (PR, PI, PBO, BCB),Surface Modification,Etch (SiO2, Si3N4),Excellent Etching Uniformity :〈3%,High Reliable Brooks Platform,Safe & Stable Process by Vacuum Transfer,Low CoC by Optimized Simple Chamber Design,Mold & Glass wafer Process Capability with High performance ESC

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